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A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF
Yuan QX(袁清习); Zhang K(张凯); Hong YL(洪友丽); Yuan, QX; Zhang, K; Hong, YL; Huang, WX; Gao, K; Wang, ZL; Zhu, PP; Gelb, J; Tkachuk, A; Hornberger, B; Feser, M; Yun, WB; Wu, ZY; Huang WX(黄万霞); Wang ZL(王至立); Zhu PP(朱佩平); Wu ZY(吴自玉)
2012
Source PublicationJOURNAL OF SYNCHROTRON RADIATION
Volume19Issue:6Pages:1021-1028
AbstractA full-field transmission X-ray microscope (TXM) operating continuously from 5 keV to 12 keV with fluorescence mapping capability has been designed and constructed at the Beijing Synchrotron Radiation Facility, a first-generation synchrotron radiation facility operating at 2.5 GeV. Spatial resolution better than 30 nm has been demonstrated using a Siemens star pattern in both absorption mode and Zernike phase-contrast mode. A scanning-probe mode fluorescence mapping capability integrated with the TXM has been shown to provide 50 p. p. m. sensitivity for trace elements with a spatial resolution (limited by probing beam spot size) of 20 mm. The optics design, testing of spatial resolution and fluorescence sensitivity are presented here, including performance measurement results.
Keywordhard X-ray transmission X-ray microscope fluorescence mapping capability trace-element mapping zone plate microscopy
Subject AreaInstruments & Instrumentation; Optics; Physics
DOI10.1107/S0909049512032852
Indexed BySCI
WOS IDWOS:000310151000025
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/224096
Collection多学科研究中心
Recommended Citation
GB/T 7714
Yuan QX,Zhang K,Hong YL,et al. A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF[J]. JOURNAL OF SYNCHROTRON RADIATION,2012,19(6):1021-1028.
APA 袁清习.,张凯.,洪友丽.,Yuan, QX.,Zhang, K.,...&吴自玉.(2012).A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF.JOURNAL OF SYNCHROTRON RADIATION,19(6),1021-1028.
MLA 袁清习,et al."A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF".JOURNAL OF SYNCHROTRON RADIATION 19.6(2012):1021-1028.
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