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nm量级薄膜厚度测量
Alternative TitleLayer thickness measurement of super thin films
陈凯; 崔明启; 郑雷; 赵屹东
2008
Source Publication强激光与粒子束
Issue2Pages:234-238
Corresponding Author陈凯
Keyword薄膜厚度 反射率拟合 Bragg衍射 Fourier变换
Funding Organization国家自然科学基金资助课题(10374088) ; 中国科学技术大学博士生创新基金资助课题
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/222632
Collection多学科研究中心
Recommended Citation
GB/T 7714
陈凯,崔明启,郑雷,等. nm量级薄膜厚度测量[J]. 强激光与粒子束,2008(2):234-238.
APA 陈凯,崔明启,郑雷,&赵屹东.(2008).nm量级薄膜厚度测量.强激光与粒子束(2),234-238.
MLA 陈凯,et al."nm量级薄膜厚度测量".强激光与粒子束 .2(2008):234-238.
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