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微晶硅薄膜的表面粗糙度及其生长机制的X射线掠角反射研究
Alternative TitleStudies on surface roughness and growth mechanisms of microcrystalline silicon films by grazing incidence X-ray reflectivity
周炳卿; 刘丰珍; 朱美芳; 周玉琴; 吴忠华; 陈兴
2007
Source Publication物理学报
Issue4Pages:2422-2427
KeywordX射线掠角反射 微晶硅薄膜 表面粗糙度 生长机制
Funding Organization国家重点基础研究发展规划(批准号:G2000028208) ; 中国科学院高能物理研究所北京同步辐射实验室开放课题基金 ; 国家自然科学基金(批准号:50662003) ; 内蒙古自治区自然科学基金(批准号:200308020104)资助的课题.~~
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/222556
Collection多学科研究中心
Recommended Citation
GB/T 7714
周炳卿,刘丰珍,朱美芳,等. 微晶硅薄膜的表面粗糙度及其生长机制的X射线掠角反射研究[J]. 物理学报,2007(4):2422-2427.
APA 周炳卿,刘丰珍,朱美芳,周玉琴,吴忠华,&陈兴.(2007).微晶硅薄膜的表面粗糙度及其生长机制的X射线掠角反射研究.物理学报(4),2422-2427.
MLA 周炳卿,et al."微晶硅薄膜的表面粗糙度及其生长机制的X射线掠角反射研究".物理学报 .4(2007):2422-2427.
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