IHEP OpenIR  > 多学科研究中心
Alternative TitleBroadband aperiodic Mo/ Si multilayer polarization elements for EUV region
朱京涛; 王占山; 王洪昌; 张众; 王风丽; 秦树基; 陈玲燕; 崔明启; 赵屹东; 孙丽娟; 周洪军; 霍同林
Source Publication光学精密工程
Keyword偏振光学元件 多层膜 相移片 检偏器 极紫外 同步辐射
Funding OrganizationSupported by the National Natural Science Foundation of China (No 60378021 and 10435050) ; the Programfor New Century Excellent Talents in University (No NCET-04-0376)
Document Type期刊论文
Recommended Citation
GB/T 7714
朱京涛,王占山,王洪昌,等. 极紫外宽带Mo/Si非周期多层膜偏振光学元件(英文)[J]. 光学精密工程,2007(12):1886-1893.
APA 朱京涛.,王占山.,王洪昌.,张众.,王风丽.,...&霍同林.(2007).极紫外宽带Mo/Si非周期多层膜偏振光学元件(英文).光学精密工程(12),1886-1893.
MLA 朱京涛,et al."极紫外宽带Mo/Si非周期多层膜偏振光学元件(英文)".光学精密工程 .12(2007):1886-1893.
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