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Alternative TitleThe microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering
周炳卿; 刘丰珍; 朱美芳; 谷锦华; 周玉琴; 刘金龙; 董宝中; 李国华; 丁琨
Source Publication物理学报
Keyword微晶硅薄膜 微结构 微空洞 x射线小角散射
Funding Organization国家基础发展规划 (973 )项目基金 (批准号 :G2 0 0 0 0 2 82 0 8) ; 中国科学院高能物理研究所北京同步辐射实验室资助的课题 .~~
Document Type期刊论文
Recommended Citation
GB/T 7714
周炳卿,刘丰珍,朱美芳,等. 利用x射线小角散射技术研究微晶硅薄膜的微结构[J]. 物理学报,2005(5):2172-2175.
APA 周炳卿.,刘丰珍.,朱美芳.,谷锦华.,周玉琴.,...&丁琨.(2005).利用x射线小角散射技术研究微晶硅薄膜的微结构.物理学报(5),2172-2175.
MLA 周炳卿,et al."利用x射线小角散射技术研究微晶硅薄膜的微结构".物理学报 .5(2005):2172-2175.
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