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不同参数溅射的ZnO薄膜硫化后的特性
Alternative TitleThe properties of the as-sputtered ZnO films under different deposition parameters after sulfidation
张仁刚; 王宝义; 张辉; 马创新; 魏龙
2005
Source Publication物理学报
Issue5Pages:2389-2393
Corresponding Author魏龙
KeywordZnS薄膜 磁控溅射 ZnO硫化 太阳电池
Funding Organization国家自然科学基金 (批准号 :10 2 75 0 77)资助的课题 .~~
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/222327
Collection多学科研究中心
核技术应用研究中心
Recommended Citation
GB/T 7714
张仁刚,王宝义,张辉,等. 不同参数溅射的ZnO薄膜硫化后的特性[J]. 物理学报,2005(5):2389-2393.
APA 张仁刚,王宝义,张辉,马创新,&魏龙.(2005).不同参数溅射的ZnO薄膜硫化后的特性.物理学报(5),2389-2393.
MLA 张仁刚,et al."不同参数溅射的ZnO薄膜硫化后的特性".物理学报 .5(2005):2389-2393.
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