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Mo/Si/C多层膜退火后的同步辐射研究
Alternative TitleA STUDY OF ANNEALED Mo/Si/C MULTILAYER FILM BY SYNCHROTRON RADIATION
朱杰; 崔明启; 郑雷; 赵屹东; 王占山
2004
Source Publication核技术
Issue7Pages:489-493
Corresponding Author朱杰
Keyword周期多层膜 退火 小角衍射 同步辐射 软X光 偏振
Funding Organization国家自然基金项目(10275078) ; 上海科学与技术发展基金项目资助(022261049)
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/222139
Collection多学科研究中心
Recommended Citation
GB/T 7714
朱杰,崔明启,郑雷,等. Mo/Si/C多层膜退火后的同步辐射研究[J]. 核技术,2004(7):489-493.
APA 朱杰,崔明启,郑雷,赵屹东,&王占山.(2004).Mo/Si/C多层膜退火后的同步辐射研究.核技术(7),489-493.
MLA 朱杰,et al."Mo/Si/C多层膜退火后的同步辐射研究".核技术 .7(2004):489-493.
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