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Mo/SiO_2软X射线多层膜的结构研究
王凤平; 王佩璇; 方正知; 崔明启; 王德武
1997
Source Publication电子显微学报
Issue4Pages:2
Keyword磁控溅射 Mo/SiO_2 周期结构 粗糙度 同步辐射装置 递推公式 结构研究 衍射谱 缓冲层 直流溅射
Funding Organization国家自然科学基金
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/221536
Collection多学科研究中心
Recommended Citation
GB/T 7714
王凤平,王佩璇,方正知,等. Mo/SiO_2软X射线多层膜的结构研究[J]. 电子显微学报,1997(4):2.
APA 王凤平,王佩璇,方正知,崔明启,&王德武.(1997).Mo/SiO_2软X射线多层膜的结构研究.电子显微学报(4),2.
MLA 王凤平,et al."Mo/SiO_2软X射线多层膜的结构研究".电子显微学报 .4(1997):2.
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