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亚微米光栅周期的软X射线多层膜光栅的衍射效率研究
Alternative TitleDIFFRACTIVE EFFICIENCY STUDY OF SOFT X-RAY MULTILAYER GRATING WITH SUB-MICRON GRATING PERIOD
袁利祥; 范正修; 殷功杰; 邵建达; 易葵; 崔明启; 刘丽冰; 缪建伟; 陈光辉; 沈孝良
1995
Source Publication物理学报
Issue2Pages:184-188
Keyword衍射效率 光栅周期 光栅衍射 射线源 同步辐射装置 光栅扫描 光学常数 衍射光 滤光片 光学薄膜
Funding Organization国家高技术研究发展计划资助的课题.
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/221426
Collection多学科研究中心
加速器中心
中国科学院高能物理研究所_大装置管理中心
Recommended Citation
GB/T 7714
袁利祥,范正修,殷功杰,等. 亚微米光栅周期的软X射线多层膜光栅的衍射效率研究[J]. 物理学报,1995(2):184-188.
APA 袁利祥.,范正修.,殷功杰.,邵建达.,易葵.,...&沈孝良.(1995).亚微米光栅周期的软X射线多层膜光栅的衍射效率研究.物理学报(2),184-188.
MLA 袁利祥,et al."亚微米光栅周期的软X射线多层膜光栅的衍射效率研究".物理学报 .2(1995):184-188.
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