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用同步辐射小角衍射方法研究多层膜周期结构
Alternative TitleSTUDY ON STRUCTURE OF MULTILAYERS BY SYNCHROTRON RADIATION SMALL ANGLE DIFFRACTION METHOD
王俊; 崔明启; 徐文轩; 黄宇营; 王德武; 刘建飞; 冼鼎昌
1994
Source Publication高能物理与核物理
Issue1Pages:13-20
Corresponding Author王俊
Keyword同步辐射,磁控溅射,多层膜,小角衍射,结构分析
Document Type期刊论文
Identifierhttp://ir.ihep.ac.cn/handle/311005/215173
Collection院士
Recommended Citation
GB/T 7714
王俊,崔明启,徐文轩,等. 用同步辐射小角衍射方法研究多层膜周期结构[J]. 高能物理与核物理,1994(1):13-20.
APA 王俊.,崔明启.,徐文轩.,黄宇营.,王德武.,...&冼鼎昌.(1994).用同步辐射小角衍射方法研究多层膜周期结构.高能物理与核物理(1),13-20.
MLA 王俊,et al."用同步辐射小角衍射方法研究多层膜周期结构".高能物理与核物理 .1(1994):13-20.
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